Technical Papers

Download PDF In-Situ Cleaning for Thin-Film Deposition
Download PDF Low-energy high-flux reactive ion assisted deposition of oxide optical coatings: performance, durability, stability and scalability
Download PDF Technical Note KRI-01: Broad-Beam Industrial Ion Sources
Download PDF Technical Note KRI-02: Ion Beam Neutralization
Download PDF Technical Note KRI-03: Charge and Momentum Exchange in an Ion Beam
Download PDF Ion-assist applications of broad-beam ion sources