Description

Companies across the globe are looking for innovative ways to reduce costs while continuing to provide their customers superior products and services. Finding the precise combination of thin film technology and system integration becomes a key factor that enables manufacturers to reduce cost, to increase production capability, and to create the competitive advantage needed to survive in today’s aggressive marketplace.

Symphony realizes the customer’s vision of functionality and features that bring value to production.

• Flexible evaporation techniques
• Integration of the most sophisticated and time-tested instruments by industrial leaders.
• Advanced multilevel software structure to satisfy the most demanding engineer, and yet still provide a very user friendly interface for the beginning technician.
• It allows complete process automation, remote control, trending, data analysis and recovery.

Symphony Advantage

Service and Support

Our motto "We serve to serve again." expresses our relentless drive for customer service - providing preventive maintenance and repair, training and technology support, process development, and continuously building a world wide service network of qualified technicians and engineers.

Delivery

Shipping time is 12 weeks ARO, unrivaled by other manufacturers in the industry.

Trouble Free Commissioning

During commissioning, Tecport will not only satisfy the equipment specifications and integrity, but also will assist our customers in process development and fine tuning system parameters. By the end of commissioning, our customers are equipped with the training and process setup to start production immediately.

Specification

Chamber	304L Stainless Steel Construction
Ultimate Pressure	10-7 Torr Range
Substiture Fixture	Dome, Flat Planetary
Evaporation Monitoring	Crystal Monitor, Optical Monitor
Process Control	Symphony provides user friendly operating software, named OPUS, with data logging, recipe builder, report generation, and remote access capabilities.
Evaporation Techniques	Thermal Resistance Evaporation, Electron Beam Evaporation, Ion Assisted Deposition (IAD), Ion Beam Sputtering (IBS), High Density Plasma Assisted Deposition (PAD)
Pumping System	Diffusion Pump, Cryogenic Pump, Turbo Pump Rotary Pump / Booster Pump Pumping time < 15 min to 3 x 10-5 Torr
Substrate heat	Quartz Halogen Heater with PID Temperature Control System
Cryogenic regenerator	Meissner Trap, Coil, 10HP compressor, T < -130 C, pumping speed up to 200,000 l/sec
Pressure gauge control	High Pressure: Penning Gauge, Ion Gauge Low Pressure: Pirani Gauge, Convectron Gauge
Utility	Electrical: 208/240/50Hz/60Hz/ 50kW 3-phase Water: 30 GPM, Delta 40 PSI @ 21°C Air: Compressed air @ 85-125 PSI

Models

Symphony 7	Symphony 9	Symphony 10	Symphony 12	Symphony 15
750mm diameter	900mm diameter	1050mm diameter	1200mm diameter	1500mm diameter

Downloads

• Brochure - Symphony Precision