Products
- Sputtering Systems
- Flexlab
- Ion Beam Sputtering
- CVD Systems
- PECVD
- Atomic Layer CVD
- TCPCVD
- Accessories
- Ultrasonic Cleaner
- Hard / Dip Systems
- Dome Oven
- Chiller / Warm Water Unit
Symphony Opus Software
User friendly operator interface for complete process automation and data analysis
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Description
Symphony Opus process control software enables you to have the best of both worlds: ease of use, as well as advanced flexible configuration parameters to satisfy the most demanding engineer. It's easy on the operator while being highly tunable for the engineer.
Operation
- Screen Navigation is simplified and intuitive—it is divided such that the left side is for the operator and the right side is for more advanced process control.
- Navigation bars as well as individual screen selectors are standard. With Symphony Opus there’s no more getting lost in a popup quagmire to change a simple system parameter.
Flexibility – System Parameters
- All system components are configurable to provide simple integration of new hardware (i.e.: type and number of evaporation sources, type and number of vacuum pumps, etc…)
- System parameters such as pressure set points, valve activation alarm set points, maintenance schedule alarm time, and leak rate checks are all configurable to give more flexibility of system operation.
- Sub component parameters such as cryogenic pump regeneration, mass flow controller, Polycold operation, and system startup and shutdown schedule are configurable.
Flexibility – Recipe Management
- Recipes are configured in blocks and then assembled into a final master recipe.
- All recipes are stored using human readable names. It is unnecessary to carry “cheat-sheet” to reference process numbers.
- All parameters are adjustable in On-Line Edit Menu.
On-Line Edit
- All parameters are adjustable in On-Line Edit Menu.
- Any change in On-Line Edit will be effective real-time, but will not be changed in saved recipe.
Security
- User can be defined with given rights of Operator, Online Edit, System, Recipe, or/and Admin rights.
- Each user has in individual login and password.
Data Logging
- Storage of process data in a database.
- Storage of alarm data in a database.
- Activity Log/Audit Log - Recording of all operator and system events in time sequence. System records all button clicks and parameter changes by Date, Time, Event, UserName, Run Number, and Recipe.
- Realtime trending and historical graphs.
- All data linked back to Run Number, Recipe, and Operator for quality purposes .
Network
- Symphony Opus is Network Ready using standard Ethernet TCP/IP.
- Managers can view the HMI screen remotely from any pc via Ethernet.
- Remote support from Tecport is possible via Ethernet or Dialup Modem.
- Process Data, Reports, and Recipe information are all viewable over a standard Ethernet connection.
Online Help
- All product manuals are accessible from the HMI. Additional manuals can be made available simply by copying them into a certain directory.
- User configurable pre-start checklists.
